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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Cheung, Rebecca
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Cheung, Rebecca:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - new book

2013, ISBN: 9781860946240

ID: 1681715

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996–2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research. Technology Technology eBook, World Scientific Publishing Company

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Rebecca Cheung
book is out-of-stock
(*)
Rebecca Cheung:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - new book

2006, ISBN: 9781860946240

ID: 691575715

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Silicon Carbide Microelectromechanical Systems for Harsh Environments Bücher > Fremdsprachige Bücher > Englische Bücher gebundene Ausgabe 30.06.2006, Imperial College Press, .200

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Imperial College Press
book is out-of-stock
(*)
Imperial College Press:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - new book

ISBN: 9781860946240

ID: 104687500

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Silicon Carbide Microelectromechanical Systems for Harsh Environments Buch (fremdspr.) Bücher>Fremdsprachige Bücher>Englische Bücher, Imperial College Press

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Rebecca Cheung
book is out-of-stock
(*)
Rebecca Cheung:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - new book

ISBN: 9781860946240

ID: c949ad327df1b2578989b9ac4226467b

Silicon Carbide Microelectromechanical Systems for Harsh Environments This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Bücher / Fremdsprachige Bücher / Englische Bücher 978-1-86094-624-0, Imperial College Press

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Silicon Carbide Microelectromechanical Systems for Harsh Environments - Rebecca Cheung
book is out-of-stock
(*)
Rebecca Cheung:
Silicon Carbide Microelectromechanical Systems for Harsh Environments - new book

ISBN: 9781860946240

ID: 117317573

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Silicon Carbide Microelectromechanical Systems for Harsh Environments Buch (fremdspr.) Bücher>Fremdsprachige Bücher>Englische Bücher, Imperial College Press

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Details of the book
Silicon Carbide Micro Electromechanical Systems for Harsh Environments
Author:

Rebecca Cheung (Editor)

Title:

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

ISBN:

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

Details of the book - Silicon Carbide Micro Electromechanical Systems for Harsh Environments


EAN (ISBN-13): 9781860946240
ISBN (ISBN-10): 1860946240
Hardcover
Paperback
Publishing year: 2006
Publisher: Imperial College Pr
181 Pages
Weight: 0,490 kg
Language: eng/Englisch

Book in our database since 17.11.2007 18:20:33
Book found last time on 30.09.2016 20:38:59
ISBN/EAN: 9781860946240

ISBN - alternate spelling:
1-86094-624-0, 978-1-86094-624-0


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