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Run-To-Run Control in Semiconductor Manufacturing - Moyne, James; Hurwitz, A. M.
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Moyne, James; Hurwitz, A. M.:
Run-To-Run Control in Semiconductor Manufacturing - hardcover

2000, ISBN: 0849311780, Lieferbar binnen 4-6 Wochen Shipping costs:Versandkostenfrei innerhalb der BRD

ID: 9780849311789

Internationaler Buchtitel. In englischer Sprache. Verlag: CRC PR INC, 368 Seiten, L=242mm, B=161mm, H=22mm, Gew.=617gr, [GR: 16850 - HC/Elektronik/Elektrotechnik/Nachrichtentechnik], [SW: - Technology & Industrial Arts], Gebunden, Klappentext: Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. TOC:Introduction.- What is Run-to-Run Control?- Target Audience.- Purpose of this Book.- Outline.- Background.- History of the Development of Run-to-Run Control.- Developing a Run-to-Run Solution.- Developing and Deploying Run-to-Run Solutions: Integrating Control.- Run-to-Run Solution Conclusions.- Summary of Run-to-Run Development and Deployment Process.- Deploying Run-to-Run Control in a Timely and Cost Effective Manner.- Overcoming Barriers to Deployment.- Future Research and Development Issues.- References. Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. TOC:Introduction.- What is Run-to-Run Control?- Target Audience.- Purpose of this Book.- Outline.- Background.- History of the Development of Run-to-Run Control.- Developing a Run-to-Run Solution.- Developing and Deploying Run-to-Run Solutions: Integrating Control.- Run-to-Run Solution Conclusions.- Summary of Run-to-Run Development and Deployment Process.- Deploying Run-to-Run Control in a Timely and Cost Effective Manner.- Overcoming Barriers to Deployment.- Future Research and Development Issues.- References.

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Run-to-Run Control in Semiconductor Manufacturing - James Moyne, Enrique del Castillo, Arnon M. Hurwitz
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James Moyne, Enrique del Castillo, Arnon M. Hurwitz:
Run-to-Run Control in Semiconductor Manufacturing - hardcover

1000, ISBN: 0849311780

[SR: 1646383], Hardcover, [EAN: 9780849311789], CRC Press, English, English, English, CRC Press, Book, CRC Press, CRC Press, Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control., 2205237011, Textbook Buyback, 44258011, Specialty Stores, 283155, Books, 226512, Materials, 227539, Chemical, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 227546, Electricity Principles, 227544, Electrical & Electronics, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 266174, General, 13707, Electronics, 227544, Electrical & Electronics, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 13725, Semiconductors, 227544, Electrical & Electronics, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 13711, General, 227544, Electrical & Electronics, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 13762, Industrial Design, 227550, Industrial, Manufacturing & Operational Systems, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 13769, Manufacturing, 227550, Industrial, Manufacturing & Operational Systems, 173515, Engineering, 173507, Professional & Technical, 1000, Subjects, 283155, Books, 394181011, Hardcover, 394174011, Binding (binding), 388186011, Refinements, 283155, Books, 618083011, Printed Books, 618072011, Format (feature_browse-bin), 388186011, Refinements, 283155, Books, 491342, Electrical & Electronic Engineering, 468212, Engineering, 465600, New & Used Textbooks, 2349030011, Specialty Boutique, 283155, Books, 712987011, General AAS, 468212, Engineering, 465600, New & Used Textbooks, 2349030011, Specialty Boutique, 283155, Books, 712982011, General AAS, 465600, New & Used Textbooks, 2349030011, Specialty Boutique, 283155, Books

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Run-to-Run Control in Semiconductor Manufacturing - Moyne, James; del Castillo, Enrique; Hurwitz, Arnon M.
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Introduction What is Run-top-Run Control? Target Audience Purpose of this Book Outline Background Current State-of-the-Art in Semiconductor Manufacturing Process Control History of the Development of Run-to-Run Control Current State o-of-the-Art in Run-to-Run Control Development and Deployment Simple Example: Run-to-Run Control and Comparison to Statistical Process Control Identifying Target Applications for Run-to-Run Control Class of Applications that can Utilize Run-t0-Run Control General Run-to-Run Control Development and Deployment Process Issues in Deploying Run-to-Run Control Developing a Run-to-Run Solution: Run-to-Run Algorithms Introduction Linear Approximation Algorithms Higher Order Approximation Algorithms Neural Network Algorithms Other Approaches Developing a Run-to-Run Solution: Practical Extensions to Algorithms Developing and Deploying Run-to-Run Solutions: Integrating Control Introduction The Generic Cell Controller Other Approaches Integrating into Factory-Wide Manufacturing System Run-to-Run Solution Development, Deployment, and Customization Methodology Introduction Process Identification Choosing a Run-to-Run Control Solution Customizing the Run-to-Run Control Solution to the Process Issues Run-to-Run Control System Deployment Case Studies Chemical-Mechanical Planarization Vapor Phase Epitaxy Advanced Topics Feasibility Analysis of Run-to-Run Control Solutions Stability Analysis of Run-to-Run Control Solutions Combining Process Run-to-Run Control with Inter-Process Control Conclusions Summary of Run-to-Run Development and Deployment Process Deploying Run-to-Run Control in a Timely and Cost Effective Manner Overcoming Barriers to Deployment Future Research and Development Issues References Technology Technology eBook, CRC Press

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Run-to-Run Control in Semiconductor Manufacturing - Moyne, James with Enrique Del Castillo and Arnon Max Hurwitz (editors)
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Moyne, James with Enrique Del Castillo and Arnon Max Hurwitz (editors):
Run-to-Run Control in Semiconductor Manufacturing - First edition

2001, ISBN: 0849311780

Hardcover, ID: 7774218142

[EAN: 9780849311789], [PU: CRC Press,, Boca Raton, London, New York, Washington DC:], MANUFACTURING, ELECTRICAL ENGINEERING., A crisp clean copy with a touch of rubbing to the covers. Sound binding, a great working/reading/reference copy. Near Fine.

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Run-to-Run Control in Semiconductor Manufacturing - Moyne, James
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Moyne, James:
Run-to-Run Control in Semiconductor Manufacturing - hardcover

2001, ISBN: 0849311780

ID: 5716971342

[EAN: 9780849311789], 2001 hardcover no dj as issued xlibrary copy withdrawn stamp on edge of pages/ in book clean text 348 pages::: J-13, [PU: CRC Press]

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Details of the book
Run-To-Run Control in Semiconductor Manufacturing

Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. TOC:Introduction.- What is Run-to-Run Control?- Target Audience.- Purpose of this Book.- Outline.- Background.- History of the Development of Run-to-Run Control.- Developing a Run-to-Run Solution.- Developing and Deploying Run-to-Run Solutions: Integrating Control.- Run-to-Run Solution Conclusions.- Summary of Run-to-Run Development and Deployment Process.- Deploying Run-to-Run Control in a Timely and Cost Effective Manner.- Overcoming Barriers to Deployment.- Future Research and Development Issues.- References.

Details of the book - Run-To-Run Control in Semiconductor Manufacturing


EAN (ISBN-13): 9780849311789
ISBN (ISBN-10): 0849311780
Hardcover
Publishing year: 2000
Publisher: CRC PR INC
368 Pages
Weight: 0,617 kg
Language: eng/Englisch

Book in our database since 04.12.2007 21:37:00
Book found last time on 20.09.2017 16:06:38
ISBN/EAN: 9780849311789

ISBN - alternate spelling:
0-8493-1178-0, 978-0-8493-1178-9


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