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Ion Implantation - Emanuele Rimini
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Emanuele Rimini:

Ion Implantation - new book

1995, ISBN: 0792395204

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As … More...

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Ion Implantation: Basics to Device Fabrication / Emanuele Rimini / Buch / The Springer International Series in Engineering and Computer Science / HC runder Rücken kaschiert / XIII / Englisch / 1994 - Rimini, Emanuele
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Rimini, Emanuele:

Ion Implantation: Basics to Device Fabrication / Emanuele Rimini / Buch / The Springer International Series in Engineering and Computer Science / HC runder Rücken kaschiert / XIII / Englisch / 1994 - hardcover

1994, ISBN: 9780792395201

[ED: Gebunden], [PU: Springer US], Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the… More...

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Rimini, Emanuele:
Ion Implantation: Basics to Device Fabrication - hardcover

1994

ISBN: 9780792395201

Hard cover, New., Sewn binding. Cloth over boards. 393 p. Contains: Unspecified. The Springer International Engineering and Computer Science, 293., New York, NY, [PU: Springer]

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Ion Implantation : Basics to Device Fabrication - Rimini, E.; Rimini, Emanuele (physics Department, University Of Catania, Italy); Rimini, Emanuele
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Rimini, E.; Rimini, Emanuele (physics Department, University Of Catania, Italy); Rimini, Emanuele:
Ion Implantation : Basics to Device Fabrication - hardcover

1994, ISBN: 0792395204

[EAN: 9780792395201], Nouveau livre, [SC: 14.15], [PU: Springer], Books

NEW BOOK. Shipping costs: EUR 14.15 GreatBookPrices, Columbia, MD, U.S.A. [5352716] [Note: 4 (sur 5)]
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Rimini, Emanuele:
Ion Implantation: Basics to Device Fabrication (the Springer International Series in Engineering and Computer Science) - hardcover

1994, ISBN: 9780792395201

Hardcover, Nouveau livre, As new., [PU: Springer]

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Ion Implantation: Basics to Device Fabrication
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ISBN:

9780792395201


Ion Implantation: Basics to Device Fabrication is a collection of research dealing with several aspects of ion implantation, including basic information on the physics of devices, ion implanters, channeling implants, yield, damage and its annealing, in addition to a host of other topics. Particular attention has been paid to those techniques that provide two-dimensional profiles of damage and of dopants, a careful treatment of silicon based devices, threshold voltage control, shallow junctions, minority carrier lifetime control by metallic ion implants, and high energy implants is given in this work. This book, based on a course preceding the biannual Ion Implantation Technology Conference, is a valuable reference for physicists, chemists, materials scientists, processing, device production, device design, and ion beam engineers interested in any aspect of ion implantation, as well as a secondary text for a graduate course on the subject.

Details of the book - Ion Implantation: Basics to Device Fabrication


EAN (ISBN-13): 9780792395201
ISBN (ISBN-10): 0792395204
Hardcover
Paperback
Publishing year: 1994
Publisher: Springer
410 Pages
Weight: 0,771 kg
Language: eng/Englisch

Book in our database since 2008-03-18T10:06:10-04:00 (New York)
Detail page last modified on 2024-01-31T09:30:44-05:00 (New York)
ISBN/EAN: 9780792395201

ISBN - alternate spelling:
0-7923-9520-4, 978-0-7923-9520-1
Alternate spelling and related search-keywords:
Book author: rimini, emanuele
Book title: ion, basics, rimini, computer science

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