. .
English
United States
Similar books
More/other books that might be very similar to this book
Search tools
Sign in
Share this book on...
Book recommendations
Latest news
Tip from find-more-books.com
Advertising
FILTER
- 0 Results
Lowest price: 9.72 €, highest price: 174.67 €, average price: 116.24 €
Sub-Half-Micron Lithography for ULSIs - Katsumi Suzuki, Shinji Matsui, Yukinori Ochiai
book is out-of-stock
(*)
Katsumi Suzuki, Shinji Matsui, Yukinori Ochiai:
Sub-Half-Micron Lithography for ULSIs - hardcover

ISBN: 0521570808

ID: 1166930419

[EAN: 9780521570800], Neubuch, [PU: Cambridge University Press], BRAND NEW, Sub-Half-Micron Lithography for ULSIs, Katsumi Suzuki, Shinji Matsui, Yukinori Ochiai, In semiconductor-device fabrication processes, lithography technology is used to print circuit patterns on semiconductor wafers. The remarkable miniaturization of semiconductor devices has been made possible only because of the continuous progress in lithography technology. However, for the trend of ever-increasing miniaturization to continue a breakthrough in lithography technology is now needed. This book describes advanced techniques under development in Japan and elsewhere that represent the key to future semiconductor-device fabrication. The background to developments in lithography technology, trends in ULSI technology and future prospects are reviewed, and the requirements that future lithography technology must meet are described. Several important lithography methods, such as deep UV lithography, X-ray lithography, electron-beam lithography, and focused ion-beam lithography are described in detail by experts in each area. The principles underlying each of these methods are illustrated at the beginning of each chapter to help the reader understand the basis of the different approaches.

New book Abebooks.de
THE SAINT BOOKSTORE, Southport, United Kingdom [51194787] [Rating: 4 (von 5)]
NEW BOOK Shipping costs: EUR 6.16
Details...
(*) Book out-of-stock means that the book is currently not available at any of the associated platforms we search.
Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics  &  Microelectronic Engineering) - Katsumi Suzuki; Shinji Matsui; Yukinori Ochiai
book is out-of-stock
(*)
Katsumi Suzuki; Shinji Matsui; Yukinori Ochiai:
Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics & Microelectronic Engineering) - used book

ISBN: 0521570808

ID: 4809716

In semiconductor-device fabrication processes, lithography technology is used to print circuit patterns on semiconductor wafers. The remarkable miniaturization of semiconductor devices has been made possible only because of the continuous progress in lithography technology. However, for the trend of ever-increasing miniaturization to continue, a breakthrough in lithography technology is now needed. This book describes advanced techniques under development that represent the key to future semiconductor-device fabrication. To help the reader understand the background to developments in lithography technology, trends in ULSI technology and future prospects are reviewed, and the requirements that future lithography technology must meet are described. Several important lithography methods, such as deep UV lithography, x-ray lithography, electron-beam lithography, and focused ion-beam lithography are described in detail by experts in each area. Other relevant technologies, such as those that concern resist materials, metrology, and defect inspection and repair are also described. electrical and electronics,engineering Books, Cambridge University Press

Used Book Thriftbooks.com
used Shipping costs:zzgl. Versandkosten, plus shipping costs
Details...
(*) Book out-of-stock means that the book is currently not available at any of the associated platforms we search.
Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor P hysics & Microelectronic Engineering) - Ochiai, Yukinori
book is out-of-stock
(*)
Ochiai, Yukinori:
Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor P hysics & Microelectronic Engineering) - hardcover

2000, ISBN: 0521570808

ID: 716888191

[EAN: 9780521570800], [PU: Cambridge University Press], A crisp clean hardcover, no markings throughout: In semiconductor-device fabrication processes, lithography technology is used to print circuit patterns on semiconductor wafers. The remarkable miniaturization of semiconductor devices has been made possible only because of the continuous progress in lithography technology. However, for the trend of ever-increasing miniaturization to continue, a breakthrough in lithography technology is now needed. This book describes advanced techniques under development that represent the key to future semiconductor-device fabrication. To help the reader understand the background to developments in lithography technology, trends in ULSI technology and future prospects are reviewed, and the requirements that future lithography technology must meet are described. Several important lithography methods, such as deep UV lithography, x-ray lithography, electron-beam lithography, and focused ion- beam lithography are described in detail by experts in each area. Other relevant technologies, such as those that concern resist materials, metrology, and defect inspection and repair are also described.

Used Book Abebooks.de
Infinity Books Japan, Tokyo, TKY, Japan [3527684] [Rating: 3 (von 5)]
Shipping costs: EUR 12.49
Details...
(*) Book out-of-stock means that the book is currently not available at any of the associated platforms we search.
Sub-Half-Micron Lithography for ULSIs - Katsumi Suzuki
book is out-of-stock
(*)
Katsumi Suzuki:
Sub-Half-Micron Lithography for ULSIs - hardcover

ISBN: 9780521570800

Hardback, [PU: CAMBRIDGE UNIVERSITY PRESS], Describes advanced techniques under development that represent the key to future semiconductor-device fabrication., Semi-conductors & Super-conductors

New book Bookdepository.com
Shipping costs:Versandkostenfrei (EUR 0.00)
Details...
(*) Book out-of-stock means that the book is currently not available at any of the associated platforms we search.
Sub-Half-Micron Lithography for ULSIs - Katsumi Suzuki; Shinji Matsui; Yukinori Ochiai
book is out-of-stock
(*)
Katsumi Suzuki; Shinji Matsui; Yukinori Ochiai:
Sub-Half-Micron Lithography for ULSIs - hardcover

2000, ISBN: 9780521570800

ID: 724033

Hardcover, Buch, [PU: Cambridge University Press]

New book Lehmanns.de
Shipping costs:Versand in 10-15 Tagen, , Versandkostenfrei innerhalb der BRD (EUR 0.00)
Details...
(*) Book out-of-stock means that the book is currently not available at any of the associated platforms we search.

Details of the book
Sub-Half-Micron Lithography for Ulsis
Author:

Editor-Katsumi Suzuki; Editor-Shinji Matsui; Editor-Yukinori Ochiai

Title:

Sub-Half-Micron Lithography for Ulsis

ISBN:

Details of the book - Sub-Half-Micron Lithography for Ulsis


EAN (ISBN-13): 9780521570800
ISBN (ISBN-10): 0521570808
Hardcover
Publishing year: 2000
Publisher: CAMBRIDGE UNIV PR
342 Pages
Language: eng/Englisch

Book in our database since 31.05.2007 00:44:41
Book found last time on 25.01.2017 10:47:45
ISBN/EAN: 9780521570800

ISBN - alternate spelling:
0-521-57080-8, 978-0-521-57080-0


< to archive...
Related books