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Scaling Issues and Design of MEMS - Salvatore Baglio
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Salvatore Baglio:
Scaling Issues and Design of MEMS - new book

ISBN: 9780470034088

ID: 9780470034088

InhaltsangabePreface.Introduction.1. Scaling of MEMS.1.1 Introduction to Scaling Issues.1.2 Examples of Dimensional Scaling Potentials.1.2.1 Scaling effects on a cantilever beam.1.2.2 Scaling of electrostatic actuators.1.2.3 Scaling of thermal actuators.1.3 Motivation, Fabrication and Scaling of MEMS.1.4 Scaling as a Methodological Approach.References.2. Scaling of Microactuators - an Overview.2.1 Electrostatic Actuators.2.1.1 Transverse combs modelling.2.1.2 Lateral combs modelling.2.2 Magnetic Transducers.2.2.1 Magnetic actuators.2.2.2 Ferromagnetic transducers.2.3 Thermal Actuators.2.3.1 Thermomechanical actuators.Acknowledgements.References.3. Scaling of Thermal Sensors.3.1 Thermoelectric Sensors.3.2 Application: Dew-Point Relative Humidity Sensors.3.2.1 Device structures and operating principles.3.2.2 Device modelling and simulations.3.2.3 Device design.3.3 Conclusions.Acknowledgements.References.4. Inductive Sensors for Magnetic Fields.4.1 Inductive Microsensors for Magnetic Particles.4.1.1 Integrated inductive sensors.4.1.2 Planar differential transformer.4.1.3 Signal-conditioning circuits.4.1.4 Simulation of the planar differential transformer.4.1.5 Experimental results.4.2 Magnetic Immunoassay Systems.Acknowledgements.References.5. Scaling of Mechanical Sensors.5.1 Introduction.5.2 Device Modelling and Fabrication Processes.5.2.1 Fabrication processes.5.2.2 Devices modelling.5.2.3 Accelerometers.5.2.4 Resonant mass sensors.5.3 Experimental Device Prototypes.5.3.1 CMOS devices.5.3.2 SOI devices.5.3.3 Finite element modelling.5.4 Scaling Issues on Microaccelerometers and Mass Sensors.5.5 Some Experimental Results.5.6 Vibrating Microgyroscopes.5.6.1 Coupled vibratory gyroscopes.Acknowledgements.References.  6. Scaling of Energy Sources.6.1 Introduction.6.2 Energy Supply Strategies for Autonomous Microsystems.6.2.1 Use of microlenses in photothermomechanical actuation.6.2.2 Technologies, materials and design of photothermomechanical actuators.6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems.6.3.1 Photothermoelectric power generation.6.4 Efficiency of the Combined Energy Supply Strategy 166.References.7. Technologies and Architectures for Autonomous MEMS Microrobots.7.1 Design Issues in Microrobots.7.2 A Microrobot Architecture Based on Photothermal Strategy.7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems.References.8. Moving towards the Nanoscale.8.1 Semiconductor-Based Nano-Electromechanical Systems.8.2 Nanofabrication Facilities.8.3 Overview of Nanosensors.8.3.1 Use of AFM for materials and nanodevices characterization.8.3.2 Scanning thermal microscopy (SThM).8.3.3 Scanning Hall probe microscopy.8.3.4 Mechanical resonant immunospecific biological detector.8.3.5 Micromechanical sensor for differential detection of nanoscale motions.8.3.6 Nanomagnetic sensors.8.3.7 Nano-wire piezoresistors.8.3.8 Nanometre-scale mechanical resonators.8.3.9 Electric charge mechanical nanosensor.8.4 Concluding Remarks.References.9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.  9.1 Introduction.9.2 Examples of Scaling Cantilever Beam Devices.9.3 DIEES-MEMSLAB-Tutorial.9.3.1 Introduction.9. Scaling Issues and Design of MEMS: InhaltsangabePreface.Introduction.1. Scaling of MEMS.1.1 Introduction to Scaling Issues.1.2 Examples of Dimensional Scaling Potentials.1.2.1 Scaling effects on a cantilever beam.1.2.2 Scaling of electrostatic actuators.1.2.3 Scaling of thermal actuators.1.3 Motivation, Fabrication and Scaling of MEMS.1.4 Scaling as a Methodological Approach.References.2. Scaling of Microactuators - an Overview.2.1 Electrostatic Actuators.2.1.1 Transverse combs modelling.2.1.2 Lateral combs modelling.2.2 Magnetic Transducers.2.2.1 Magnetic actuators.2.2.2 Ferromagnetic transducers.2.3 Thermal Actuators.2.3.1 Thermomechanical actuators.Acknowledgements.References.3. Scaling of Thermal Sensors.3.1 Thermoelectric Sensors.3.2 Application: Dew-Point Relative Humidity Sensors.3.2.1 Device structures and operating principles.3.2.2 Device modelling and simulations.3.2.3 Device design.3.3 Conclusions.Acknowledgements.References.4. Inductive Sensors for Magnetic Fields.4.1 Inductive Microsensors for Magnetic Particles.4.1.1 Integrated inductive sensors.4.1.2 Planar differential transformer.4.1.3 Signal-conditioning circuits.4.1.4 Simulation of the planar differential transformer.4.1.5 Experimental results.4.2 Magnetic Immunoassay Systems.Acknowledgements.References.5. Scaling of Mechanical Sensors.5.1 Introduction.5.2 Device Modelling and Fabrication Processes.5.2.1 Fabrication processes.5.2.2 Devices modelling.5.2.3 Accelerometers.5.2.4 Resonant mass sensors.5.3 Experimental Device Prototypes.5.3.1 CMOS devices.5.3.2 SOI devices.5.3.3 Finite element modelling.5.4 Scaling Issues on Microaccelerometers and Mass Sensors.5.5 Some Experimental Results.5.6 Vibrating Microgyroscopes.5.6.1 Coupled vibratory gyroscopes.Acknowledgements.References.  6. Scaling of Energy Sources.6.1 Introduction.6.2 Energy Supply Strategies for Autonomous Microsystems.6.2.1 Use of microlenses in photothermomechanical actuation.6.2.2 Technologies, materials and design of photothermomechanical actuators.6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems.6.3.1 Photothermoelectric power generation.6.4 Efficiency of the Combined Energy Supply Strategy 166.References.7. Technologies and Architectures for Autonomous MEMS Microrobots.7.1 Design Issues in Microrobots.7.2 A Microrobot Architecture Based on Photothermal Strategy.7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems.References.8. Moving towards the Nanoscale.8.1 Semiconductor-Based Nano-Electromechanical Systems.8.2 Nanofabrication Facilities.8.3 Overview of Nanosensors.8.3.1 Use of AFM for materials and nanodevices characterization.8.3.2 Scanning thermal microscopy (SThM).8.3.3 Scanning Hall probe microscopy.8.3.4 Mechanical resonant immunospecific biological detector.8.3.5 Micromechanical sensor for differential detection of nanoscale motions.8.3.6 Nanomagnetic sensors.8.3.7 Nano-wire piezoresistors.8.3.8 Nanometre-scale mechanical resonators.8.3.9 Electric charge mechanical nanosensor.8.4 Concluding Remarks.References.9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.  9.1 Introduction.9.2 Examples of Scaling Cantilever Beam Devices.9.3 DIEES-MEMSLAB-Tutorial.9.3.1 Introduction.9. Nanomaterials Mikroelektromechanik Nanomaterialien Nanotechnologie Nanotechnology, John Wiley & Sons

New book Rheinberg-Buch.de
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Scaling Issues and Design of MEMS - Salvatore Baglio
book is out-of-stock
(*)
Salvatore Baglio:
Scaling Issues and Design of MEMS - new book

ISBN: 9780470034088

ID: 9780470034088

InhaltsangabePreface.Introduction.1. Scaling of MEMS.1.1 Introduction to Scaling Issues.1.2 Examples of Dimensional Scaling Potentials.1.2.1 Scaling effects on a cantilever beam.1.2.2 Scaling of electrostatic actuators.1.2.3 Scaling of thermal actuators.1.3 Motivation, Fabrication and Scaling of MEMS.1.4 Scaling as a Methodological Approach.References.2. Scaling of Microactuators - an Overview.2.1 Electrostatic Actuators.2.1.1 Transverse combs modelling.2.1.2 Lateral combs modelling.2.2 Magnetic Transducers.2.2.1 Magnetic actuators.2.2.2 Ferromagnetic transducers.2.3 Thermal Actuators.2.3.1 Thermomechanical actuators.Acknowledgements.References.3. Scaling of Thermal Sensors.3.1 Thermoelectric Sensors.3.2 Application: Dew-Point Relative Humidity Sensors.3.2.1 Device structures and operating principles.3.2.2 Device modelling and simulations.3.2.3 Device design.3.3 Conclusions.Acknowledgements.References.4. Inductive Sensors for Magnetic Fields.4.1 Inductive Microsensors for Magnetic Particles.4.1.1 Integrated inductive sensors.4.1.2 Planar differential transformer.4.1.3 Signal-conditioning circuits.4.1.4 Simulation of the planar differential transformer.4.1.5 Experimental results.4.2 Magnetic Immunoassay Systems.Acknowledgements.References.5. Scaling of Mechanical Sensors.5.1 Introduction.5.2 Device Modelling and Fabrication Processes.5.2.1 Fabrication processes.5.2.2 Devices modelling.5.2.3 Accelerometers.5.2.4 Resonant mass sensors.5.3 Experimental Device Prototypes.5.3.1 CMOS devices.5.3.2 SOI devices.5.3.3 Finite element modelling.5.4 Scaling Issues on Microaccelerometers and Mass Sensors.5.5 Some Experimental Results.5.6 Vibrating Microgyroscopes.5.6.1 Coupled vibratory gyroscopes.Acknowledgements.References.  6. Scaling of Energy Sources.6.1 Introduction.6.2 Energy Supply Strategies for Autonomous Microsystems.6.2.1 Use of microlenses in photothermomechanical actuation.6.2.2 Technologies, materials and design of photothermomechanical actuators.6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems.6.3.1 Photothermoelectric power generation.6.4 Efficiency of the Combined Energy Supply Strategy 166.References.7. Technologies and Architectures for Autonomous MEMS Microrobots.7.1 Design Issues in Microrobots.7.2 A Microrobot Architecture Based on Photothermal Strategy.7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems.References.8. Moving towards the Nanoscale.8.1 Semiconductor-Based Nano-Electromechanical Systems.8.2 Nanofabrication Facilities.8.3 Overview of Nanosensors.8.3.1 Use of AFM for materials and nanodevices characterization.8.3.2 Scanning thermal microscopy (SThM).8.3.3 Scanning Hall probe microscopy.8.3.4 Mechanical resonant immunospecific biological detector.8.3.5 Micromechanical sensor for differential detection of nanoscale motions.8.3.6 Nanomagnetic sensors.8.3.7 Nano-wire piezoresistors.8.3.8 Nanometre-scale mechanical resonators.8.3.9 Electric charge mechanical nanosensor.8.4 Concluding Remarks.References.9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.  9.1 Introduction.9.2 Examples of Scaling Cantilever Beam Devices.9.3 DIEES-MEMSLAB-Tutorial.9.3.1 Introduction.9. Scaling Issues and Design of MEMS: InhaltsangabePreface.Introduction.1. Scaling of MEMS.1.1 Introduction to Scaling Issues.1.2 Examples of Dimensional Scaling Potentials.1.2.1 Scaling effects on a cantilever beam.1.2.2 Scaling of electrostatic actuators.1.2.3 Scaling of thermal actuators.1.3 Motivation, Fabrication and Scaling of MEMS.1.4 Scaling as a Methodological Approach.References.2. Scaling of Microactuators - an Overview.2.1 Electrostatic Actuators.2.1.1 Transverse combs modelling.2.1.2 Lateral combs modelling.2.2 Magnetic Transducers.2.2.1 Magnetic actuators.2.2.2 Ferromagnetic transducers.2.3 Thermal Actuators.2.3.1 Thermomechanical actuators.Acknowledgements.References.3. Scaling of Thermal Sensors.3.1 Thermoelectric Sensors.3.2 Application: Dew-Point Relative Humidity Sensors.3.2.1 Device structures and operating principles.3.2.2 Device modelling and simulations.3.2.3 Device design.3.3 Conclusions.Acknowledgements.References.4. Inductive Sensors for Magnetic Fields.4.1 Inductive Microsensors for Magnetic Particles.4.1.1 Integrated inductive sensors.4.1.2 Planar differential transformer.4.1.3 Signal-conditioning circuits.4.1.4 Simulation of the planar differential transformer.4.1.5 Experimental results.4.2 Magnetic Immunoassay Systems.Acknowledgements.References.5. Scaling of Mechanical Sensors.5.1 Introduction.5.2 Device Modelling and Fabrication Processes.5.2.1 Fabrication processes.5.2.2 Devices modelling.5.2.3 Accelerometers.5.2.4 Resonant mass sensors.5.3 Experimental Device Prototypes.5.3.1 CMOS devices.5.3.2 SOI devices.5.3.3 Finite element modelling.5.4 Scaling Issues on Microaccelerometers and Mass Sensors.5.5 Some Experimental Results.5.6 Vibrating Microgyroscopes.5.6.1 Coupled vibratory gyroscopes.Acknowledgements.References.  6. Scaling of Energy Sources.6.1 Introduction.6.2 Energy Supply Strategies for Autonomous Microsystems.6.2.1 Use of microlenses in photothermomechanical actuation.6.2.2 Technologies, materials and design of photothermomechanical actuators.6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems.6.3.1 Photothermoelectric power generation.6.4 Efficiency of the Combined Energy Supply Strategy 166.References.7. Technologies and Architectures for Autonomous MEMS Microrobots.7.1 Design Issues in Microrobots.7.2 A Microrobot Architecture Based on Photothermal Strategy.7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems.References.8. Moving towards the Nanoscale.8.1 Semiconductor-Based Nano-Electromechanical Systems.8.2 Nanofabrication Facilities.8.3 Overview of Nanosensors.8.3.1 Use of AFM for materials and nanodevices characterization.8.3.2 Scanning thermal microscopy (SThM).8.3.3 Scanning Hall probe microscopy.8.3.4 Mechanical resonant immunospecific biological detector.8.3.5 Micromechanical sensor for differential detection of nanoscale motions.8.3.6 Nanomagnetic sensors.8.3.7 Nano-wire piezoresistors.8.3.8 Nanometre-scale mechanical resonators.8.3.9 Electric charge mechanical nanosensor.8.4 Concluding Remarks.References.9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.  9.1 Introduction.9.2 Examples of Scaling Cantilever Beam Devices.9.3 DIEES-MEMSLAB-Tutorial.9.3.1 Introduction.9. Mikroelektromechanik Nanomaterialien Nanomaterials Nanotechnologie Nanotechnology, John Wiley & Sons

New book Rheinberg-Buch.de
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Scaling Issues and Design of MEMS - Nicolo Savalli#Salvatore Castorina#Salvatore Baglio
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Nicolo Savalli#Salvatore Castorina#Salvatore Baglio:
Scaling Issues and Design of MEMS - new book

2008, ISBN: 9780470034088

ID: 733498294

This accessible volume delivers a complete design methodology formicroelectromechanical systems (MEMS). Focusing on the scaling ofan autonomous micro-system, it explains the real-world problems andtheoretical concepts of several different aspects inherent to theminiaturization of sensors and actuators. It reports on theanalysis of dimensional scaling, the modelling, design andexperimental characterization of a wide range of specific devicesand applications, including: * temperature microsensors based on an integrated complementarymetal-oxide-semiconductor (CMOS) thermocouple; * mechanical sensors; * inductive microsensors for the detection of magneticparticles; * electrostatic, thermal and magnetic actuators. With an original approach, this informative text encompasses theentire range of themes currently at the forefront of MEMS,including an analysis of the importantissue of energy sources inMEMS. In addition, the book explores contemporary research into thedesign of complete MEMS with a case study on colonies ofmicrobots. Scaling Issues and Design of MEMS aims to improve thereader´s basic knowledge on modelling issues of complex microdevices, and to encourage new thinking about scaling effects. Itwill provide support for practising engineers working within thedefence industry and will also be of welcome interest to graduatestudents and researchers with a background in electronicengineering, physics, chemistry, biology and materials science. Scaling Issues and Design of MEMS eBooks > Fremdsprachige eBooks > Englische eBooks > Sach- & Fachthemen PDF 31.07.2008 eBook, John Wiley & Sons, .200

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Scaling Issues and Design of MEMS - Salvatore Baglio
book is out-of-stock
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Salvatore Baglio:
Scaling Issues and Design of MEMS - new book

ISBN: 9780470034088

ID: 9780470034088

This accessible volume delivers a complete design methodology formicroelectromechanical systems (MEMS). Focusing on the scaling ofan autonomous micro-system, it explains the real-world problems andtheoretical concepts of several different aspects inherent to theminiaturization of sensors and actuators. It reports on theanalysis of dimensional scaling, the modelling, design andexperimental characterization of a wide range of specific devicesand applications, including: Scaling Issues and Design of MEMS: This accessible volume delivers a complete design methodology formicroelectromechanical systems (MEMS). Focusing on the scaling ofan autonomous micro-system, it explains the real-world problems andtheoretical concepts of several different aspects inherent to theminiaturization of sensors and actuators. It reports on theanalysis of dimensional scaling, the modelling, design andexperimental characterization of a wide range of specific devicesand applications, including: Mikroelektromechanik Nanomaterialien Nanomaterials Nanotechnologie Nanotechnology, John Wiley & Sons

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Scaling Issues and Design of MEMS - Salvatore Baglio;  Salvatore Castorina;  Nicolo Savalli
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Salvatore Baglio; Salvatore Castorina; Nicolo Savalli:
Scaling Issues and Design of MEMS - First edition

2008, ISBN: 9780470034088

ID: 25452557

[ED: 1], Auflage, eBook Download (PDF), eBooks, [PU: Wiley-Interscience]

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