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Run-To-Run Control in Semiconductor Manufacturing
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Run-To-Run Control in Semiconductor Manufacturing - used book

ISBN: 0849311780

Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine ""runs, "" thereby minimizing process drift, shift, and variability and wi… More...

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Run-To-Run Control in Semiconductor Manufacturing - A. M. Hurwitz, James Moyne, Duane Boning
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Run-To-Run Control in Semiconductor Manufacturing - hardcover

ISBN: 0849311780

[SR: 3592061], Gebundene Ausgabe, [EAN: 9780849311789], Crc, Crc, Book, [PU: Crc], Crc, 541686, Kategorien, 187254, Biografien & Erinnerungen, 120, Börse & Geld, 403434, Business & Karrie… More...

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Run-To-Run Control in Semiconductor Manufacturing - A. M. Hurwitz, James Moyne, Duane Boning
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A. M. Hurwitz, James Moyne, Duane Boning:
Run-To-Run Control in Semiconductor Manufacturing - hardcover

ISBN: 0849311780

[SR: 3592061], Gebundene Ausgabe, [EAN: 9780849311789], Crc, Crc, Book, [PU: Crc], Crc, 541686, Kategorien, 187254, Biografien & Erinnerungen, 120, Börse & Geld, 403434, Business & Karrie… More...

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Run-to-Run Control in Semiconductor Manufacturing - Moyne, James; del Castillo, Enrique; Hurwitz, Arnon M.
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Moyne, James; del Castillo, Enrique; Hurwitz, Arnon M.:
Run-to-Run Control in Semiconductor Manufacturing - new book

ISBN: 9780849311789

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with … More...

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Run-to-Run Control in Semiconductor Manufacturing - James Moyne
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James Moyne:
Run-to-Run Control in Semiconductor Manufacturing - hardcover

ISBN: 9780849311789

Hardback, [PU: Taylor & Francis Inc], Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits o… More...

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Details of the book
Run-To-Run Control in Semiconductor Manufacturing

Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. TOC:Introduction.- What is Run-to-Run Control?- Target Audience.- Purpose of this Book.- Outline.- Background.- History of the Development of Run-to-Run Control.- Developing a Run-to-Run Solution.- Developing and Deploying Run-to-Run Solutions: Integrating Control.- Run-to-Run Solution Conclusions.- Summary of Run-to-Run Development and Deployment Process.- Deploying Run-to-Run Control in a Timely and Cost Effective Manner.- Overcoming Barriers to Deployment.- Future Research and Development Issues.- References.

Details of the book - Run-To-Run Control in Semiconductor Manufacturing


EAN (ISBN-13): 9780849311789
ISBN (ISBN-10): 0849311780
Hardcover
Publishing year: 2000
Publisher: CRC PR INC
368 Pages
Weight: 0,617 kg
Language: eng/Englisch

Book in our database since 2007-12-04T15:37:00-05:00 (New York)
Detail page last modified on 2019-10-30T10:06:28-04:00 (New York)
ISBN/EAN: 0849311780

ISBN - alternate spelling:
0-8493-1178-0, 978-0-8493-1178-9


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