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Resolution Enhancement Techniques in Optical Lithography v. TT47 (Tutorial Texts) - Alfred Kwok-Kit Wong
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Alfred Kwok-Kit Wong:
Resolution Enhancement Techniques in Optical Lithography v. TT47 (Tutorial Texts) - Paperback

2001, ISBN: 0819439959

[SR: 7111299], Paperback, [EAN: 9780819439956], SPIE, SPIE, Book, [PU: SPIE], 2001-03-31, SPIE, 71, Computing & Internet, 269189, Certification, 269265, Computer Science, 269899, Databases, 14288081, Digital Lifestyle, 14288151, Digital Music, 13731411, Digital Photography, 14263921, Digital Video, 269655, Hardware, 10781841, Mac OS, 269602, Microsoft Windows, 269520, Networking & Security, 403958, New to Computing, 408230, PC & Video Games, 14224461, Professionals, 269678, Programming, 269870, Software & Graphics, 269623, UNIX & Linux, 269406, Web Development, 1025612, Subjects, 266239, Books, 278150, Electrical, 278151, Electric Motors, 922290, Electrical Engineering, 278152, Electrician Skills, 922288, Electromagnetic Theory, 278153, Energy, 278299, Nanotechnology, 278157, Power Generation & Distribution, 278115, Engineering & Technology, 57, Science & Nature, 1025612, Subjects, 266239, Books, 278161, Applied Optics, 278160, Electronics Engineering, 278141, Electronics & Communications Engineering, 278115, Engineering & Technology, 57, Science & Nature, 1025612, Subjects, 266239, Books, 278169, Circuits, 278160, Electronics Engineering, 278141, Electronics & Communications Engineering, 278115, Engineering & Technology, 57, Science & Nature, 1025612, Subjects, 266239, Books, 922390, Engineering Physics, 278115, Engineering & Technology, 57, Science & Nature, 1025612, Subjects, 266239, Books, 278429, Electromagnetism, 278409, Physics, 57, Science & Nature, 1025612, Subjects, 266239, Books, 278433, Light, Optics & Laser, 278409, Physics, 57, Science & Nature, 1025612, Subjects, 266239, Books, 922952, Physics, 277889, Cosmology, 278439, Relativity, 922868, Popular Science, 57, Science & Nature, 1025612, Subjects, 266239, Books, 571046, Electronics & Telecommunications Engineering, 564346, Engineering, 564334, Scientific, Technical & Medical, 1025612, Subjects, 266239, Books, 564354, Physics, 571024, Applied Physics, 570990, Electricity, Magnetism & Electromagnetism, 571010, Mechanics, 570994, Particle Physics, 571004, Quantum Mechanics, 570600, Theoretical Physics, 564334, Scientific, Technical & Medical, 1025612, Subjects, 266239, Books

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Resolution Enhancement Techniques in Optical Lithography: v. TT47 - Alfred Kwok-Kit Wong
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Alfred Kwok-Kit Wong:
Resolution Enhancement Techniques in Optical Lithography: v. TT47 - new book

2001, ISBN: 9780819439956

ID: 9780819439956

Resolution Enhancement Techniques in Optical Lithography: v. TT47: Paperback: SPIE Press: 9780819439956: 31 Mar 2001: The acceleration of integrated circuit miniaturization is challenging lithographers to push the limits of optical lithography by ever more precise engineering and innovations. This work summarizes the latest enhancement research that has matured since the 1980s. The acceleration of integrated circuit miniaturization is challenging lithographers to push the limits of optical lithography by ever more precise engineering and innovations. As IC device dimensions grow smaller, circuits outpace the introduction of shorter exposure wavelengths and higher numerical aperture lenses, increasing the importance of resolution enhancement techniques. This work summarizes the latest enhancement research that has matured since the 1980s. Theoretical and practical aspects of commonly used techniques are discussed, serving students and practising lithographers alike. #Conoptical Imaging And Resolution; Modified Illumination; Optical Proximity Correction; Alternating Phase-Shifting Mask; Attenuated Phase-Shifting Mask; Selecting Appropriate Rets; Second Generation Rets; Concluding Remarks. Optical Physics, , , , Resolution Enhancement Techniques in Optical Lithography: v. TT47, Alfred Kwok-Kit Wong, 9780819439956, SPIE Press, , , , ,, [PU: SPIE Optical Engineering Press]

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Resolution Enhancement Techniques in Optical Lithography - Wong, Alfred K.
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Wong, Alfred K.:
Resolution Enhancement Techniques in Optical Lithography - new book

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Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers. Technology Technology eBook, SPIE

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Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) - Alfred Kwok-Kit Wong
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Alfred Kwok-Kit Wong:
Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) - Paperback

ISBN: 9780819439956

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Resolution Enhancement Techniques in Optical Lithography - Alfred Kwok-Kit Wong
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Alfred Kwok-Kit Wong:
Resolution Enhancement Techniques in Optical Lithography - Paperback

2001, ISBN: 9780819439956

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Softcover, Buch, [PU: SPIE Press]

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Details of the book
Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)

This tutorial summarizes optical lithography enhancement research and development over the past 20 years. Discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers.

Contents

- Foreword
- Preface
- List of symbols
- Introduction
- Optical imaging and resolution
- Modified illumination
- Optical proximity correction
- Alternating phase-shifting mask
- Attenuated phase-shift mask
- Selecting appropriate RETs
- Second-generation RETs
- Concluding remarks
- k1 conversion charts
- Bibliography
- Index

Details of the book - Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)


EAN (ISBN-13): 9780819439956
ISBN (ISBN-10): 0819439959
Paperback
Publishing year: 2001
Publisher: SPIE

Book in our database since 05.06.2007 04:55:43
Book found last time on 22.05.2017 11:28:21
ISBN/EAN: 0819439959

ISBN - alternate spelling:
0-8194-3995-9, 978-0-8194-3995-6


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