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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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David Attwood:

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - used book

ISBN: 052102997X

ID: 6119377

This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science. electrical and electronics,engineering,nuclear physics,particle physics,physics,science and math,science and math,textbooks Physics, Cambridge University Press

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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David Attwood:

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Paperback

ISBN: 052102997X

[SR: 353086], Taschenbuch, [EAN: 9780521029971], Cambridge University Press, Cambridge University Press, Book, [PU: Cambridge University Press], Cambridge University Press, Paperback, 60518011, Prinzip der Elektrizität, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 1320249031, Optik, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 56404011, Kernphysik, 56375011, Physik, 56047011, Wissenschaft, 54071011, Genres, 52044011, Fremdsprachige Bücher

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Attwood, David
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Attwood, David:
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Paperback

2007

ISBN: 052102997X

ID: 14097352862

[EAN: 9780521029971], [PU: Cambridge University Press], Science|Radiation, Technology|Electricity, This Book is in Good Condition. Clean Copy With Light Amount of Wear. 100% Guaranteed. Summary: Preface; Acknowledgements; 1. Introduction; 2. Radiation and scattering at EUV and soft x-ray wavelengths; 3. Wave propagation and refractive index at EUV and soft x-ray wavelengths; 4. Multilayer interference coatings; 5. Synchrotron radiation; 6. Physics of hot dense plasmas; 7. Extreme ultraviolet and soft x-ray lasers; 8. Coherence at short wavelengths; 9. Soft x-ray microscopy with diffractive optics; 10. Extreme ultraviolet and x-ray lithography; Appendices; Index.

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Paperback

2007, ISBN: 9780521029971

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Paperback, Neubuch, Buy with confidence. Excellent Customer Service & Return policy. Ships Fast. 24*7 Customer Service., [PU: Cambridge University Press]

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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood
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David Attwood:
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Paperback

2007, ISBN: 052102997X

ID: 9011428473

[EAN: 9780521029971], [PU: Cambridge University Press], Science|Radiation, Technology|Electricity

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Details of the book
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications
Author:

Attwood, David

Title:

Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

ISBN:

052102997X

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

Details of the book - Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications


EAN (ISBN-13): 9780521029971
ISBN (ISBN-10): 052102997X
Paperback
Publishing year: 2007
Publisher: CAMBRIDGE UNIV PR
470 Pages
Weight: 0,866 kg
Language: eng/Englisch

Book in our database since 29.05.2007 09:45:08
Book found last time on 26.01.2017 13:01:48
ISBN/EAN: 052102997X

ISBN - alternate spelling:
0-521-02997-X, 978-0-521-02997-1

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