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Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications
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Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications - new book

ISBN: 9780470625958

ID: 978047062595

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews... This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment. —Randy Wallace, Department Head, Discovery Park Library, University of North Texas Books, Science and Nature, Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications Books>Science and Nature, Wiley

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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - Karen A. Reinhardt, Richard F. Reidy
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Karen A. Reinhardt, Richard F. Reidy:

Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - hardcover

ISBN: 0470625953

[SR: 431299], Gebundene Ausgabe, [EAN: 9780470625958], John Wiley & Sons Inc, John Wiley & Sons Inc, Book, [PU: John Wiley & Sons Inc], John Wiley & Sons Inc, 60537011, Halbleiter, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 56441011, Technologie, 56447011, Erneuerbare Energien, 56448011, Innovationen, 1320311031, Nachschlagewerke, 56444011, Nanotechnologie, 56449011, Philosophie der Technologie, 56445011, Risiken, 56446011, Sicherheit & Gesundheit, 273011011, Soziale Aspekte, 54518011, Technisches Denken & Schreiben, 56451011, Technologie & Gesellschaft, 56211011, Technologiegeschichte, 56442011, Zukunftsforschung, 56047011, Wissenschaft, 54071011, Genres, 52044011, Fremdsprachige Bücher

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Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - Karen A Reinhardt, Richard F Reidy
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Karen A Reinhardt, Richard F Reidy:
Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - hardcover

ISBN: 0470625953

[SR: 462709], Gebundene Ausgabe, [EAN: 9780470625958], Wiley-Scrivener, Wiley-Scrivener, Book, [PU: Wiley-Scrivener], Wiley-Scrivener, 60537011, Halbleiter, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 56441011, Technologie, 56447011, Erneuerbare Energien, 56448011, Innovationen, 1320311031, Nachschlagewerke, 56444011, Nanotechnologie, 56449011, Philosophie der Technologie, 56445011, Risiken, 56446011, Sicherheit & Gesundheit, 273011011, Soziale Aspekte, 54518011, Technisches Denken & Schreiben, 56451011, Technologie & Gesellschaft, 56211011, Technologiegeschichte, 56442011, Zukunftsforschung, 56047011, Wissenschaft, 54071011, Genres, 52044011, Fremdsprachige Bücher

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Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - Karen A Reinhardt, Richard F Reidy
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Karen A Reinhardt, Richard F Reidy:
Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener) - hardcover

ISBN: 0470625953

[SR: 462709], Gebundene Ausgabe, [EAN: 9780470625958], Wiley-Scrivener, Wiley-Scrivener, Book, [PU: Wiley-Scrivener], Wiley-Scrivener, 60537011, Halbleiter, 60516011, Elektrotechnik, 60448011, Ingenieurwesen & Technik, 60447011, Architektur, Technik & Ingenieurswesen, 54071011, Genres, 52044011, Fremdsprachige Bücher, 56441011, Technologie, 56447011, Erneuerbare Energien, 56448011, Innovationen, 1320311031, Nachschlagewerke, 56444011, Nanotechnologie, 56449011, Philosophie der Technologie, 56445011, Risiken, 56446011, Sicherheit & Gesundheit, 273011011, Soziale Aspekte, 54518011, Technisches Denken & Schreiben, 56451011, Technologie & Gesellschaft, 56211011, Technologiegeschichte, 56442011, Zukunftsforschung, 56047011, Wissenschaft, 54071011, Genres, 52044011, Fremdsprachige Bücher

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Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications - Herausgeber: Reinhardt, Karen A. Reidy, Richard F.
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Herausgeber: Reinhardt, Karen A. Reidy, Richard F.:
Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications - hardcover

ISBN: 9780470625958

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Details of the book
Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications
Author:

Reinhardt, Karen A.; Reidy, Richard F.

Title:

Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications

ISBN:

0470625953

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

Details of the book - Handbook of Cleaning for Semiconductor Manufacturing: Fundamental and Applications


EAN (ISBN-13): 9780470625958
ISBN (ISBN-10): 0470625953
Hardcover
Publishing year: 2011
Publisher: John Wiley & Sons
590 Pages
Weight: 1,193 kg
Language: eng/Englisch

Book in our database since 18.05.2011 23:09:14
Book found last time on 27.02.2017 09:44:36
ISBN/EAN: 0470625953

ISBN - alternate spelling:
0-470-62595-3, 978-0-470-62595-8

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