Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) - Paperback
ISBN: 0819439959
[SR: 1966210], Paperback, [EAN: 9780819439956], SPIE Publications, SPIE Publications, Book, [PU: SPIE Publications], SPIE Publications, This tutorial summarizes optical lithography enhanc… More...
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ISBN: 9780819439956
Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It… More...
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Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Paperback
2001, ISBN: 9780819439956
SPIE Press, Taschenbuch, 214 Seiten, Publiziert: 2001-03-31T00:00:01Z, Produktgruppe: Book, Verkaufsrang: 4751601, Elektrotechnik, Ingenieurwissenschaft & Technik, Naturwissenschaften & T… More...
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Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Paperback
2001, ISBN: 9780819439956
SPIE Press, Taschenbuch, 214 Seiten, Publiziert: 2001-03-31T00:00:01Z, Produktgruppe: Book, Verkaufsrang: 4751601, Elektrotechnik, Ingenieurwissenschaft & Technik, Naturwissenschaften & T… More...
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ISBN: 9780819439956
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Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) - Paperback
ISBN: 0819439959
[SR: 1966210], Paperback, [EAN: 9780819439956], SPIE Publications, SPIE Publications, Book, [PU: SPIE Publications], SPIE Publications, This tutorial summarizes optical lithography enhanc… More...
ISBN: 9780819439956
Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It… More...
Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Paperback
2001
ISBN: 9780819439956
SPIE Press, Taschenbuch, 214 Seiten, Publiziert: 2001-03-31T00:00:01Z, Produktgruppe: Book, Verkaufsrang: 4751601, Elektrotechnik, Ingenieurwissenschaft & Technik, Naturwissenschaften & T… More...
Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Paperback
2001, ISBN: 9780819439956
SPIE Press, Taschenbuch, 214 Seiten, Publiziert: 2001-03-31T00:00:01Z, Produktgruppe: Book, Verkaufsrang: 4751601, Elektrotechnik, Ingenieurwissenschaft & Technik, Naturwissenschaften & T… More...
ISBN: 9780819439956
Fnac.com : Livraison gratuite et - 5% sur tous les livres. Resolution Enhancement Techniques in Optical Lithography, Tutorial Texts in Optical Engineering, V. Tt 47 - Livre. Découvrez des… More...
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Contents
- Foreword
- Preface
- List of symbols
- Introduction
- Optical imaging and resolution
- Modified illumination
- Optical proximity correction
- Alternating phase-shifting mask
- Attenuated phase-shift mask
- Selecting appropriate RETs
- Second-generation RETs
- Concluding remarks
- k1 conversion charts
- Bibliography
- Index
Details of the book - Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47)
EAN (ISBN-13): 9780819439956
ISBN (ISBN-10): 0819439959
Paperback
Publishing year: 2001
Publisher: SPIE Press
Book in our database since 2007-06-04T22:55:43-04:00 (New York)
Detail page last modified on 2020-03-15T09:40:47-04:00 (New York)
ISBN/EAN: 9780819439956
ISBN - alternate spelling:
0-8194-3995-9, 978-0-8194-3995-6
Alternate spelling and related search-keywords:
Book author: kit wong
Book title: resolution, spie vol, enhancement
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