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Run-to-Run Control in Semiconductor Manufacturing - hardcover

1992, ISBN: 9780849311789

North-Holland, 1992-07-01. Hardcover. Very Good. 1992 first edition North-Holland / Elsevier (Amsterdam, The Netherlands), 6 1/4 x 9 inches tall blue cloth hardcover, no dust jacket (as… More...

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Run-to-Run Control in Semiconductor Manufacturing
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Run-to-Run Control in Semiconductor Manufacturing - First edition

2000, ISBN: 9780849311789

Hardcover

Editor: Moyne, James, Editor: del Castillo, Enrique, Editor: Hurwitz, Arnon M. Contributor: Khan, B. Karumullah, Contributor: Chen, Argon, Contributor: Guo, Ruey-Shan, Contributor: Moyne,… More...

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Khan, B Karumullah (Contributions by), and Moyne, James (Editor), and Chen, Argon (Contributions by):
Run-to-Run Control in Semiconductor Manufacturing - hardcover

2000

ISBN: 9780849311789

Hard cover, D'occasion, très bon état, Very Good condition. A copy that may have a few cosmetic defects. May also contain light spine creasing or a few markings such as an owner's name, s… More...

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Run-to-Run Control in Semiconductor Manufacturing - James Moyne
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Run-to-Run Control in Semiconductor Manufacturing - hardcover

ISBN: 9780849311789

Hardback, [PU: Taylor & Francis Inc], Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits o… More...

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Run-to-Run Control in Semiconductor Manufacturing - hardcover

2000, ISBN: 0849311780

[EAN: 9780849311789], D'occasion, très bon état, [SC: 9.12], [PU: Taylor & Francis Group], Used book that is in excellent condition. May show signs of wear or have minor defects., Books

NOT NEW BOOK. Shipping costs: EUR 9.12 Better World Books, Mishawaka, IN, U.S.A. [51315977] [Note: 5 (sur 5)]

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Details of the book
Run-to-Run Control in Semiconductor Manufacturing

Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. TOC:Introduction.- What is Run-to-Run Control?- Target Audience.- Purpose of this Book.- Outline.- Background.- History of the Development of Run-to-Run Control.- Developing a Run-to-Run Solution.- Developing and Deploying Run-to-Run Solutions: Integrating Control.- Run-to-Run Solution Conclusions.- Summary of Run-to-Run Development and Deployment Process.- Deploying Run-to-Run Control in a Timely and Cost Effective Manner.- Overcoming Barriers to Deployment.- Future Research and Development Issues.- References.

Details of the book - Run-to-Run Control in Semiconductor Manufacturing


EAN (ISBN-13): 9780849311789
ISBN (ISBN-10): 0849311780
Hardcover
Publishing year: 2000
Publisher: CRC Press
368 Pages
Weight: 0,617 kg
Language: eng/Englisch

Book in our database since 2007-12-04T15:37:00-05:00 (New York)
Detail page last modified on 2023-08-11T08:39:26-04:00 (New York)
ISBN/EAN: 0849311780

ISBN - alternate spelling:
0-8493-1178-0, 978-0-8493-1178-9
Alternate spelling and related search-keywords:
Book author: hurwitz, enrique del castillo, moyne, arnon
Book title: run, semiconductor manufacturing


Information from Publisher

Author: A. M. Hurwitz; James Moyne; Duane Boning; Enrique DelCastillo
Title: Run-to-Run Control in Semiconductor Manufacturing
Publisher: CRC Press
141,00 € (DE)
141,00 CHF (CH)
Not available (reason unspecified)

00; GB


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Latest similar book:
9781420040661 Run-to-Run Control in Semiconductor Manufacturing (J.K. Petersen)


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