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Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices - Paik, Ungyu, Park, Jea-Gun
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Paik, Ungyu, Park, Jea-Gun:

Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices - hardcover

2009, ISBN: 9781420059113

Taylor & Francis Inc, Gebundene Ausgabe, Auflage: Illustrated, 222 Seiten, Publiziert: 2009-02-04T00:00:01Z, Produktgruppe: Buch, 1.1 kg, Flash, Programmierung & Webdesign, Computer & Int… More...

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Paik, U: Nanoparticle Engineering for Chemical-Mechanical Pl - Ungyu Paik|Jea-Gun Park
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Ungyu Paik|Jea-Gun Park:

Paik, U: Nanoparticle Engineering for Chemical-Mechanical Pl - hardcover

2009, ISBN: 1420059114

[EAN: 9781420059113], Neubuch, [PU: CRC Press], SCIENCE CHEMISTRY INDUSTRIAL & TECHNICAL CMP PROCESS PAA CONCENTRATION LAYER POLISHING RATE PVP POLYMER REMOVAL FILM THICKNESS VARIATION SO… More...

NEW BOOK. Shipping costs:Versandkostenfrei. (EUR 0.00) moluna, Greven, Germany [73551232] [Rating: 4 (von 5)]
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Paik, U: Nanoparticle Engineering for Chemical-Mechanical Pl - Paik, Ungyu Park, Jea-Gun
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Paik, Ungyu Park, Jea-Gun:
Paik, U: Nanoparticle Engineering for Chemical-Mechanical Pl - hardcover

2008

ISBN: 9781420059113

[ED: Gebunden], [PU: Taylor & Francis Inc], Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Hanyang University, Seoul, South KoreaIn the d… More...

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4
Nanoparticle Engineering for Chemical-Mechanical Planarization - Ungyu Paik; Jea-Gun Park
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Ungyu Paik; Jea-Gun Park:
Nanoparticle Engineering for Chemical-Mechanical Planarization - hardcover

2009, ISBN: 9781420059113

Fabrication of Next-Generation Nanodevices, Buch, Hardcover, [PU: Crc Press Inc], Crc Press Inc, 2009

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5
Nanoparticle Engineering for Chemical-Mechanical Planarization - Ungyu Paik, Jea-Gun Park
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Ungyu Paik, Jea-Gun Park:
Nanoparticle Engineering for Chemical-Mechanical Planarization - hardcover

ISBN: 9781420059113

hardback, [PU: CRC Press]

in stock. Shipping costs:Usually dispatched within 10 days. (EUR 7.45) Blackwells.co.uk

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Bibliographic data of the best matching book

Details of the book
Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices

Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance.

Details of the book - Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices


EAN (ISBN-13): 9781420059113
ISBN (ISBN-10): 1420059114
Hardcover
Publishing year: 2009
Publisher: Taylor & Francis Inc
191 Pages
Weight: 0,499 kg
Language: eng/Englisch

Book in our database since 2008-06-10T18:04:11-04:00 (New York)
Detail page last modified on 2023-11-26T11:59:28-05:00 (New York)
ISBN/EAN: 9781420059113

ISBN - alternate spelling:
1-4200-5911-4, 978-1-4200-5911-3
Alternate spelling and related search-keywords:
Book author: paik, gun, jea, jeå
Book title: fabric, nanoparticle engineering chemical mechanical planarization fabrication next generation nanodevices, parker gun


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