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Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) - Alfred Kwok-Kit Wong
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Alfred Kwok-Kit Wong:

Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47) - Paperback

ISBN: 0819439959

[SR: 1966210], Paperback, [EAN: 9780819439956], SPIE Publications, SPIE Publications, Book, [PU: SPIE Publications], SPIE Publications, This tutorial summarizes optical lithography enhanc… More...

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Resolution Enhancement Techniques in Optical Lithography - Wong, Alfred K.
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Resolution Enhancement Techniques in Optical Lithography - new book

ISBN: 9780819439956

Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It… More...

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Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Wong, Alfred Kwok-Kit
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Wong, Alfred Kwok-Kit:
Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Paperback

2001

ISBN: 9780819439956

SPIE Press, Taschenbuch, 214 Seiten, Publiziert: 2001-03-31T00:00:01Z, Produktgruppe: Book, Verkaufsrang: 4751601, Elektrotechnik, Ingenieurwissenschaft & Technik, Naturwissenschaften & T… More...

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Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Wong, Alfred Kwok-Kit
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Wong, Alfred Kwok-Kit:
Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47) - Paperback

2001, ISBN: 9780819439956

SPIE Press, Taschenbuch, 214 Seiten, Publiziert: 2001-03-31T00:00:01Z, Produktgruppe: Book, Verkaufsrang: 4751601, Elektrotechnik, Ingenieurwissenschaft & Technik, Naturwissenschaften & T… More...

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ISBN: 9780819439956

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Details of the book
Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47)
Author:
Title:
ISBN:

9780819439956


This tutorial summarizes optical lithography enhancement research and development over the past 20 years. Discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers.

Contents

- Foreword
- Preface
- List of symbols
- Introduction
- Optical imaging and resolution
- Modified illumination
- Optical proximity correction
- Alternating phase-shifting mask
- Attenuated phase-shift mask
- Selecting appropriate RETs
- Second-generation RETs
- Concluding remarks
- k1 conversion charts
- Bibliography
- Index

Details of the book - Resolution Enhancement Techniques in Optical Lithography (Tutorial Texts in Optical Engineering, V. Tt 47)


EAN (ISBN-13): 9780819439956
ISBN (ISBN-10): 0819439959
Paperback
Publishing year: 2001
Publisher: SPIE Press

Book in our database since 2007-06-04T22:55:43-04:00 (New York)
Detail page last modified on 2020-03-15T09:40:47-04:00 (New York)
ISBN/EAN: 9780819439956

ISBN - alternate spelling:
0-8194-3995-9, 978-0-8194-3995-6
Alternate spelling and related search-keywords:
Book author: kit wong
Book title: resolution, spie vol, enhancement

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